It is of the outmost importance to be able to simulate and predict the pressure evolution in vacuum systems, as a function of pump distribution, outgassing surfaces and system geometry. SAES RIAL Vacuum can run calculations with well recognized programs in the scientiﬁc vacuum community, like MOLFLOW+, VASCO, LTspice, and also code developed internally, like SimulaTorr.
An example of the modeling of NEG coating distribution along the chamber section is showed in the pictures for the given chamber proﬁle.
Non Evaporable Getter (NEG) coating.
In this case the physical model included three sputtering cathode wires for the sputtering sources.
Coating thickness and chemical composition after the deposition process can be certiﬁed by means of experimental measures on silicon coupons representative of the sputtering process.
Silicon coupons are inserted in extension nipples attached to the chamber and exposed to the same coating process.